Abstract:The authors proposed that novel oxide superlattice structures of crystalline TiO 2 /ZnO on sapphire substrates could be fabricated for high-reflection multilayer mirrors at 2.734 nm. In the experimental study, both rutile TiO 2 (200) and wurtzite ZnO (0001) thin films were grown epitaxially on the same sapphire (0001) substrates by atomic layer epitaxy (ALE) at 450°C. the authors also demonstrated for the first time that the novel oxide superlattice structure of 10bilayer TiO 2 /ZnO on a sapphire substrate gav… Show more
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