2015
DOI: 10.1117/12.2076219 View full text |Buy / Rent full text
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Abstract: Focal planes of 80x60 VO x microbolometers with pixel pitch of 104 µm were developed in support of the remote sensing of ice clouds in the spectral range from 7.9 to 50 µm. A new design that relies on the use of central posts to support the microbolometer platform was shown effective in minimizing the structural deformation usually occurred in platforms of large area. A process for goldblack coating and patterning of the focal plane arrays was established. It was found that the goldblack absorbs more than 98 %… Show more

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